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Event

Date

May 28 2026

Time

6:00 pm - 8:00 pm

Location

Northeastern University - Burlington Campus - Building 5
147 South Bedford Street, Burlington, MA

PACKAGING CHALLENGES IN MEMS-BASED INERTIAL MEASUREMENT UNITS

Microsystems Society

Speaker: Mike Flaherty of Analog Devices, Inc.

MEMS-based IMUs are sensing units that provide motion measurement in rotational and linear direction, and occasionally other sensing modalities of pressure or temperature are added to it. In past, IMU sensing units were designed using small discrete sensors with limited axes which were then combined to form integrated units in small form factor modules. As MEMS silicon manufacturing processes matured, IMUs have been designed into a single silicon with performance tradeoffs. IMUs in single silicon have been commercialized for mass market like consumer and handheld applications driven by need for scale, lower cost, short life cycle, lower power, and higher mechanical reliability challenges. In navigational use cases, such as in automotive, industrial, and aerospace, IMUs are still designed with discrete sensors due to extremely high precision, repeatability, long life, and embedded processing. The question is: what are the challenges that make designers to implement IMUs using integration of multiple (discrete) sensors?

Location: 147 South Bedford Street, Northeastern University Burlington Campus, Burlington, Massachusetts Building: Building 5.

May 2026 28 May – Microsystems Flyer

Agenda

6:00 – 6:45 Light Dinner and Networking

6:45 – 7:45 Technical Talk

Registration:  https://events.vtools.ieee.org/m/560435