Course Summary:

Microelectromechanical Systems (MEMS) applications in RF and microwave electronics are on the verge of revolutionizing wireless communications. In particular, RF MEMS promises to endow wireless handsets, base stations and satellites with the key properties of low-power consumption and reconfigurability, which in turn will enable superior functionality and performance. In this course, a comprehensive exposition of the state-of-the-art in MEMS technology applied to RF devices, circuits and systems is given. The topics to be presented include: RF MEMS fabrication technology, MEMS Actuators, Passive devices (Transmission Lines, Capacitors, Inductors, Switches, Varactors, Resonators), Circuits (Filters, Oscillators, Phase Shifters, Couplers), Systems (Transceivers, etc.)

Who Should Attend:

Students, engineers, designers, manufacturers, marketing and business development managers, and executives currently involved in the study, development, or manufacturing of wireless systems for both commercial and defense markets.

Course Objectives: This course in aims at getting interested parties informed on:

• RF MEMS fabrication processes, devices, circuits, systems, packaging, reliability and CAD

• How to apply RF MEMS technology to create superior wireless systems

• How to evaluate competing RF MEMS devices and technologies in light of your capabilities, applications and budget.

• How to identify opportunities for RF MEMS insertion in wireless applications

Course Schedule-Day 1

8:30 AM -10:00 AM

Overview of RF MEMS Technology and Applications by Hector J. De Los Santos, NanoMEMS Research, LLC

Course overview, including RF MEMS technology fundamentals and pitfalls, and its salient applications in RF/microwave such as devices (switches, varactors, resonators), circuits (filters, VCOs and phase shifters), and systems (phased array antennas).

10:30 AM-12:00 Noon RF Passives I by Dr. J. Robert Reid, AFRL

Transmission Lines. Capacitors, Inductors

1:00 PM-2:30 PM RF Passives II by Hector J. De Los Santos, NanoMEMS Research, LLC

MEM Switches. Varactors

3:00 PM-5:00 PM MEMS Actuators by Prof. Carol Livermore, MIT

Actuators convert energy between the electrical and mechanical domains. This lecture addresses the basic principles underlying the operation, the design and the fabrication of MEMS actuators.

Course Schedule-Day 2

8:30 AM-10:00 AM RF MEMS Fabrication Technology by Dr. Nils Hoivik, IBM Thomas J. Watson Research Center

RF MEMS materials and fabrication techniques. Review of established fabrication processes and their device applications. Micromachined and movable MEMS devices. MEMS-CMOS integration.

10:30 AM-12:00 Noon RF MEMS Phase Shifters by Hector J. De Los Santos

Key RF MEMS phase shifter topologies (1-100GHz) and attributes. State-of-the-art RF MEMS phase-shifter implementations. Comparison of RF MEMS-based phase shifters and competing technologies.

1:00 PM-3:00 PM RF MEMS-Based Resonators, Filters and Oscillators by Mr. Gavin K. Ho, Georgia Tech

Electrostatically-actuated MEM resonator  physics. Key performance parameters (stability, power handling capacity, intrinsic noise).

3:30 PM-5:00 PM FBAR Resonators and Applications by Hector J. De Los Santos

FBAR physics and fabrication technology. FBAR filters. FBAR oscillators.

Course Schedule-Day 3

8:30 AM-10:00 AM RF MEMS Packaging by Stephen F. Bart, NSTI

Packaging and sealing techniques. RF feedthrough design. Package characterization (e.g., hermeticity).

10:30 AM-12:00 Noon RF MEMS Reliability by Dr. John Maciel, RADANT MEMS, Inc.

Main RF MEMS switch failure modes. Analysis methodologies.

1:00 PM-2:30 PM RF MEMS-Based Architectures and Front-Ends by Prof. Mourad El-Gamal, McGill University

State-of-the-art transceiver architectures (TAs). Future RF MEMS-based TA concepts. Potential applicability of RF MEMS to enable MIMO, antenna diversity and SOC.

3:00 PM-5:00 PM RF MEMS CAD Exhibition  by Various Vendors

Attendees will have the opportunity to engage RF MEMS CAD Vendors, including, Ansoft, Coventor and IntelliSense, who will be exhibiting and demonstrating their software tools. Pertinent RF MEMS design flow, methodology and design tools will be addressed.

For more information, please send e-mail to: info@nanomems-research.com

Registration includes, complete course notes, instruction, coffee breaks and lunch. Daily or  Full Course Registration is available. See the Boston Section website for course cancellation and refund policy.

Decision (Run/Cancel) Date for  this Courses is Monday, April 5, 2006

Daily Registration (multiply by 2 for two days of instruction)

Full Course Registration (all three sessions)

Course Fee Schedule:

On-line Registration and Payment

On-line registration is closed for this course, but registration is still available on-site or by contacting the office at 781-245-5405.

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Updated Tuesday January 16, 2007